Robot Handling for Advanced Industrial Robot
نویسندگان
چکیده
منابع مشابه
Fixture-based industrial robot calibration for silicon wafer handling
1 This work was supported in part by Adept Technology, Inc. and 2000 California State MICRO Grant 00-032. 4 Sr. automation engineer, TMG, Intel Corp., 2501 NW 229 Street, Hillsboro, OR 97124. Former postdoctoral researcher in ALPHA Lab. Abstract Semiconductor manufacturing industry requires highly accurate robot operation with short downtime. We develop a fast, low cost and easy-to-operate cali...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2018
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.84.319